AMAT P5000 Multi-Process CVD
- Company Name:Russell Co., Ltd.
- Membership:Free Member
- Member Since:2005. 08.30
- Country/Region:Korea
- City:Chungcheongbuk-do
- Contact:Seokyoung-Ahn
- Related Keywords:Multi-Process CVD
Russell Co., Ltd.
- Home
- Products
- Used Equipment
- AMAT P5000 Multi-Process CVD
Contact us
Russell Co., Ltd.
[Korea]
- Address
- 1-2, Doha-ri, Munbaek-myeon, Jincheon-gun, Chungcheongbuk-do
- Phone
- 82-43-5328818
- Contact name
- Seokyoung-Ahn
Description
Feature
- Id: RUS-E0004
- Maker: AMAT
- Model: AMAT P5000
- Process: CVD
- Wafer Size: 200mm
Product Introduction
- Mark II P-5000 Mainframe
- 3 Standard Single Frequency Chambers
- Thru-the-wall Installation
- 2 Monitors (Clean Room & Maintenance Monitor)
- 3 P-TEOS Configuration, Version-IV Hot Box
- 21 Slot VME
- In/Output Wafer Sensor, WPS Sensor
- Remote AC Rack
- Minicontroller
- 3 ENI (OEM-12B) RF Generators
- 15 Slot Storage Elevator (Slot Spacing: 1802 Step)
- AMAT 0 Heat-exchanger
- Chamber Position A, B, C
- Jungle Box: Standard P-TEOS Configuration (All Unit MFCs)
- MFCs Subject to Confirmation
- N2, 1000 sccm, UFC 1660
- O2, 3000 sccm, UFC 1660
- C2F6, 1000 sccm, UFC 1660
- HE, 2000 sccm, UFC 1660
- TEOS, 6000 sccm, UFM 8000 series(MFM) - Process Pumps: Not Include
Product Image
Other products from this supplier
Related products from premium suppliers on EC21
){kind=link}
Browse: Manufacturer Directory Premium Suppliers Site Map
About EC21 Contact Us Terms & Conditions Report Item Online Trading Risks Product Listing Policy
Copyright (c)1997-2026 EC21 Inc. All Rights Reserved. EC21 in KoreanChinese
Business Registry Number: 120-86-03931 | Mall order sales Registration Number: 강남-5838